PI2103 Gas Concentration Analyzer
PI5310 Gas Concentration Analyzer
SI Gas Concentration Analyzers
The Picarro SI Series of analyzers can be integrated with the SLiM 100 and SAM systems to address specific monitoring needs. They combine the power of extreme sensitivity and accuracy for a range of organic contaminants and VOCs with a highly reliable, simple and compact design. They are compliant with SEMI standards, easy to install, and inexpensive to maintain.
Analyzers
Gases Measured
SI3401
SAM-S and SAM-C
In semiconductor fabs, process tools are spread over large cleanroom areas and multiple floors. Air handlers recirculate most of the air within a cleanroom, which can quickly spread AMCs. Traditional sampler designs degrade individual analyzer performance using a linear manifold limiting the gas flow rate to each analyzer. As a result, traditional samplers relegate analyzer performance to the lowest common denominator. Time to detect an AMC is ultimately affected, which can lead to a false alarm or even missing an AMC event altogether.
Gas Concentration Analyzer for Sulfur Dioxide (SO2)
The SI5450 analyzer offers the power of highly sensitive laser spectroscopy in a robust, easy-to-use, compact design. It employs a mid-IR laser that effectively measures the concentration of SO2 gas with a high degree of accuracy and precision. It offers significant advantages compared with incumbent AMC measurement techniques, such as ion-mobility spectrometry (IMS), ion chromatography, mass spectroscopy, and UV fluorescence. The legacy techniques suffer the inadequacies of high costs of ownership, performance shortfalls and slow speeds of response.
Gas Concentration Analyzer for Ammonia (NH3)
The Picarro SI2103 gas concentration analyzer delivers ultraprecise, parts-per-trillion (ppt) measurements of ammonia (NH3) in a reliable, easy-to-use, compact design. The SI2013 can be commissioned and operating within minutes, requires no field calibration or consumables, and can operate for months without user interaction.
Gas Concentration Analyzer for Hydrogen Fluoride (HF) and Ammonia (NH3)
The Picarro SI2306 gas concentration analyzer delivers ultra-precise, parts-per-trillion (ppt) measurements of hydrogen fluoride (HF) and ammonia (NH3) in a reliable, easy-to-use, compact design. The SI2306 can be commissioned and operating within minutes, requires no field calibration or consumables, and can operate for months without user interaction.
Gas Concentration Analyzer for Hydrogen Sulfide (H2S)
The Picarro SI2104 gas concentration analyzer delivers ultra-precise, parts-per-billion (ppb) measurements of hydrogen sulfide (H2S) in a reliable, easy-to-use, compact design. The SI2104 can be commissioned and operating within minutes, requires no field calibration or consumables, and can operate for months without user interaction.
Gas Concentration Analyzer for Hydrogen Chloride (HCl)
The Picarro SI2108 gas concentration analyzer delivers ultra-precise, parts-per-trillion (ppt) measurements of hydrogen chloride (HCI) in a reliable, easy-to-use, compact design. The SI2108 can be commissioned and operating within minutes, requires no field calibration or consumables, and can operate for months without user interaction.
Gas Concentration Analyzer for Hydrogen Fluoride (HF)
The Picarro SI2205 gas concentration analyzer delivers ultra-precise, parts-per-trillion (ppt) measurements of hydrogen fluoride (HF) in a reliable, easy-to-use, compact design. The SI2205 can be commissioned and operating within minutes, requires no field calibration or consumables, and can operate for months without user interaction.
Gas Concentration Analyzer for NH3, HCI, HF
The SI3401 AMC Gas Concentration Analyzer delivers real-time measurements of ammonia (NH3), hydrochloric acid (HCI), and hydrofluoric acid (HF). Designed for use in fabs, the SI3401 analyzer enables operators to quickly identify and address contamination events that can affect wafer yield.
Utilizing Picarro’s highly selective, sensitive, and accurate Cavity Ringdown Spectroscopy (CRDS), the SI3401 analyzer features:
SAM-C
The SAM-C AMC Monitoring System integrates Picarro’s industry-leading cavity ring-down spectroscopy (CRDS) analyzers into a high-performance sampling system. Traditional sampler designs degrade individual analyzer performance through the use of a linear manifold which limits the gas flow rate to each analyzer. As a result, traditional samplersrelegate analyzer performance to the lowest common denominator. Time to detect an AMC is ultimately affected, which can lead to a false alarm or even missing an AMC event altogether.
SAM-S
The SAM-S AMC Mobile Monitoring System integrates Picarro’s industry-leading cavity ring-down spectroscopy (CRDS) analyzers into a high-performance sampling system. Traditional sampler designs degrade individual analyzer performance through the use of a linear manifold which limits the gas flow rate to each analyzer. As a result, traditional samplers relegate analyzer performance to the lowest common denominator. Time to detect an AMC is ultimately affected, which can lead to a false alarm or even missing an AMC event altogether.
SLiM 100
Volatile organic compounds (VOCs) and inorganic compounds within the lithography process cause defects on reticles, hazing of scanner optics, and other serious problems that damage expensive lithography tools and can result in yield loss. The Picarro SLiM 100 Lithography Monitoring System is a 1-ppb class detection system that integrates Picarro’s industry leading cavity ring-down spectroscopy (CRDS) analyzers into a high-performance sampling system specifically for monitoring VOCs in the fab.
SI2205 Gas Concentration Analyzer
The Picarro SI2205 gas concentration analyzer delivers fast, precise, real-time measurements of hydrogen fluoride (HF) at parts-per-trillion (ppt) sensitivity with negligible drift for atmospheric science and air quality applications. It incorporates coated components in the critical gas pathway. This reduces the propensity of HF molecules to adhere to pathway surfaces, which improves measurement response time. The SI2205 requires virtually no consumables, thereby offering significant ease-of-use and lower cost of ownership benefits. The analyzer is rugged and easily transportable.
SI2108 Gas Concentration Analyzer
SI2104 Gas Concentration Analyzer
G2509 Gas Concentration Analyzer
H2O2 Vapor Sterilization
Vapor phase H2O2 is used for biodecontamination in many pharmaceutical processes.
AutoMate Prep Device
16-Port Distribution Manifold (Silco)
The Picarro 16-Port Distribution Manifold provides unparalleled multiport sample-data collection.
G2207-i Isotope and Gas Concentration Analyzer
The Picarro G2207-i gas concentration and isotope analyzer combines high precision and low drift O2 concentration measurement with δ18O analysis in ambient air. This makes it ideal for challenging applications including atmospheric oxygen monitoring to identify the biogeochemical process involved in the carbon cycle.
GasScouterTM G4302 Mobile Gas Concentration Analyzer
The Picarro GasScouter™ G4302 is a new-generation, light-weight, portable, battery-powered gas concentration analyzer designed for science on the move. It is a perfect mobile solution for real-time methane emission source attribution in the world’s most challenging, remote environments.
Induction Module
High-Precision Autosampler and Vaporizer
Caddy™ Continuous Flow Interface
The Caddy™ Continuous Flow Interface (A2100) connects commercially available solid and liquid bulk sample preparation instruments—including the Picarro Combustion Module—to Picarro analyzers for high-precision carbon isotope (13C) measurements.
Combustion Module
Low-Leak Diaphragm Pump
Liaison™ Universal Interface
L2130-i Isotope and Gas Concentration Analyzer
High-precision triple oxygen isotope research in water is finally simple and affordable.
G2210-i Isotope Analyzer
The Picarro G2210-i isotope analyzer precisely, simultaneously, and continuously measures δ13C in methane (CH4) and the ethane (C2H6) to methane (CH4) ratio for real-time source attribution and quantification of methane emissions.
G2308 Gas Concentration Analyzer
The Picarro G2308 gas concentration analyzer provides simultaneous, precise measurement of nitrous oxide (N2O), methane (CH4) at parts-per-billion (ppb), and water (H2O) vapor at parts-per-million (ppm) sensitivity with negligible drift for agriculture soil science, ecology, and emissions quantification.
G2508 Gas Concentration Analyzer
The Picarro G2508 gas concentration analyzer provides simultaneous, precise measurement of nitrous oxide (N2O), methane (CH4), carbon dioxide (CO2), ammonia (NH3) at parts-per-billion (ppb), and water (H2O) vapor at parts-per-million (ppm) sensitivity with negligible drift for agriculture soil science, ecology, and emissions quantification.
G5310 Gas Concentration Analyzer
The Picarro G5310 gas concentration analyzer provides simultaneous, precise measurement of nitrous oxide (N2O), carbon monoxide (CO) at parts-per-trillion (ppt), and water (H2O) vapor at parts-per-million (ppm) sensitivity with negligible drift for atmospheric science, air quality, and emissions quantification.
GasScouterTM G4301 Mobile Gas Concentration Analyzer
The Picarro GasScouter™ G4301 is a new-generation, light-weight, portable, battery-powered gas concentration analyzer designed for science on the move.
G2108 Gas Concentration Analyzer
The Picarro G2108 gas concentration analyzer provides precise, real-time measurement of hydrogen chloride (HCl) and water (H2O) vapor at parts-per-trillion (ppt) sensitivity with negligible drift for atmospheric science and air quality applications.
G2401 Gas Concentration Analyzer
The Picarro G2401 gas concentration analyzer provides simultaneous, precise measurement of carbon monoxide (CO), carbon dioxide (CO2), methane (CH4) at parts-per-billion (ppb), and water (H2O) vapor at parts-per-million (ppm) sensitivity with negligible drift for atmospheric science, air quality, and emissions quantification.
Continuous Water Sampler (CWS) A0217
The Picarro Continuous Water Sampler (CWS) incorporates a porous membrane that enables diffusive sampling of water isotopes.
G2121-i Isotope and Gas Concentration Analyzer
The Picarro G2121-i isotope and gas concentration analyzer measures δ13C in high carbon dioxide (CO2) concentration (2000 – 4000 ppm) and CO2 gas concentration when it is coupled to a sample preparation peripheral such as a Bulk Combustion Module (A0201).
Closed System Measurements
Small Sample Introduction Module 2
High-precision δ13C measurements of small volume CO2 and CH4 gas samples.
G2132-i Isotope Analyzer
The Picarro G2132-i isotope analyzer precisely and continuously measures δ13C in methane (CH4) to help identify the origin of CH4 emissions from biogenesis or anthropogenesis sources.
Micro-Combustion Module
The Picarro Micro-Combustion Module (A0214) effectively removes spectral interference for commonly occurring alcohols and plant products.
G2203 Gas Concentration Analyzer
The Picarro G2203 gas concentration analyzer provides simultaneous, precise measurement of methane (CH4) and acetylene (C2H2) at parts-per-billion (ppb) sensitivity with negligible drift for measuring fugitive emissions of CH4 from landfills, or other extended CH4 sources, using a C2H2 tracer measurement for quantifiable emission rates.
G2311-f EC Flux Gas Concentration Analyzer
The Picarro G2301-f flux gas concentration analyzer provides simultaneous, precise measurement of carbon dioxide (CO2), methane (CH4), and water (H2O) vapor at 10 Hz for eddy covariance, gradient, and eddy accumulation methodologies.
G2201-i Isotopic Analyzer
The Picarro G2201-i isotope analyzer precisely and continuously measures δ13C in carbon dioxide (CO2) and in methane (CH4) to help understand the biological and geological mechanisms that produce and consume CO2.
G2401-m In-flight Gas Concentration Analyzer
The Picarro G2401-m gas concentration analyzer provides simultaneous, precise measurement of carbon monoxide (CO), carbon dioxide (CO2), methane (CH4) at parts-per-billion (ppb), and water (H2O) vapor at parts-per-million (ppm) sensitivity with negligible drift for atmospheric science, air quality, and emissions quantification.
G2301 Gas Concentration Analyzer
The Picarro G2301 gas concentration analyzer provides simultaneous, precise measurement of carbon dioxide (CO2), methane (CH4) at parts-per-billion (ppb) and water (H2O) vapor at parts-per-million (ppm) sensitivity with negligible drift for atmospheric science, air quality, and emissions quantification.
G2204 Gas Concentration Analyzer
The Picarro G2204 gas concentration analyzer provides simultaneous, precise measurement of methane (CH4) and hydrogen sulfide (H2S) at parts-per-billion (ppb) sensitivity with negligible drift for emissions measurements from landfills, refineries, paper mills, or industrial plants.
High-Precision Vaporizer
Supporting the most precise isotope analysis of water, the A0211 works with small volumes of water and for samples containing up to 20% salt.