HCl (SI2108)

The Picarro SI2108 gas concentration analyzer delivers ultra-precise, parts-per-trillion (ppt) measurements of hydrogen chloride (HCI) in a reliable, easy-to-use, compact design. The SI2108 can be commissioned and operating within minutes, requires no field calibration or consumables, and can operate for months without user interaction.

Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
Fast, continuous analysis in seconds
Virtually no downtime or consumables cost
Free of interference from common fab chemicals
Extreme accuracy for event confirmation
No field calibration required

Status

Active

Gas Detected	Hydrogen Chloride (HCl)
Precision (1σ)	≤45 ppt (10 sec), ≤15 ppt (100 sec)
Lower Detectable Limit (3σ)	45 ppt
Method Detection Limit (per Semi C10-1109)	250 ppt
Linearity (per IEC 61207)	±1%
Accuracy at span	±5% @ full scale
Accuracy at zero	±50 ppt
Instrument-to-Instrument Consistency	±5% @ full scale ±50 ppt @ zero
Measurement Range	0-2 ppm
Measurement Interval^*	< 3s
Sample Flow Rate	~2 slpm
Combined Response Times (T90/10 + T10/90) @ 20 ppb	<3 min
Fall Times T90/10 @ 20 ppb	<1 min

^*-Measurement interval at span may increase as much as 2x above listed values.

Measurement Technique	Cavity Ring-Down Spectroscopy
Calibration Period Recommendation	Calibration not required - Initial validation at 6 months, then every 12 months thereafter
Time Required to Perform Validation	Estimated at <15 minutes per manufacturer’s instructions
Measurement Cell Temperature Control	±0.005°C
Measurement Cell Pressure Control	±0.0002 atm
Operating Temperature	15 to 35°C (operating); -10 to 50°C (storage)
Ambient Humidity	<99% RH non-condensing
Accessories	Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional)
Communication Interfaces	RS-232, Ethernet, USB, analog 0–10 V, Modbus, 4-20mA (optional)
Sample Inlet Connection	1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing)
Dimensions	Analyzer: 17" w × 8.38" h x 24.4" d (43.2 × 21.3 × 62 cm)
Weight	73 lbs. (33.18 kg) including external pump
Power Requirements	100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state
Warranty	12 months
Certifications	CE conformance
Country of Manufacture	USA

Components/Parts	Actions	Frequency
Particulate filter	Replace	Every 6 months
Measurement Validation	Proxy validation	Every 12 months
Pump	Rebuild (diaphragm)	Preventive maintenance every 2 years
Fan assemblies	Replace	Preventive maintenance every 2 years
External Pump	Replace	Every 5 years

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