The Picarro SI Series of analyzers can be integrated with the SLiM 100 and SAM systems to address specific monitoring needs. They combine the power of extreme sensitivity and accuracy for a range of organic contaminants and VOCs with a highly reliable, simple and compact design. They are compliant with SEMI standards, easy to install, and inexpensive to maintain.
Analyzers | Gases Measured |
---|---|
NH3, HF, HCl | |
HF | |
HCl | |
H2S | |
HF, NH3 | |
NH3 | |
SO2 |