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The Picarro SI Series of analyzers can be integrated with the SLiM 100 and SAM systems to address specific monitoring needs. They combine the power of extreme sensitivity and accuracy for a range of organic contaminants and VOCs with a highly reliable, simple and compact design. They are compliant with SEMI standards, easy to install, and inexpensive to maintain.

Analyzers

Gases Measured

SI3401

NH3, HF, HCl

SI2205

HF

SI2108

HCl

SI2104

H2S

SI2306

HF, NH3

SI2103

NH3

SI5450

SO2