English
The Picarro SI2306 gas concentration analyzer delivers ultra-precise, parts-per-trillion (ppt) measurements of hydrogen fluoride (HF) and ammonia (NH3) in a reliable, easy-to-use, compact design. The SI2306 can be commissioned and operating within minutes, requires no field calibration or consumables, and can operate for months without user interaction.
- Real-time AMC monitoring in cleanrooms, FOUP and fab equipment
- Fast, continuous analysis in seconds
- Virtually no downtime or consumables cost
- Free of interference from common fab chemicals
- Extreme accuracy for event confirmation
- No field calibration required
Gas Detected | Hydrogen Flouride (HF) | Ammonia (NH3) |
|---|---|---|
Precision (1σ) | ≤30 ppt (10 sec), | ≤300 ppt (10 sec), |
Lower Detectable Limit (3σ) | 30 ppt | 300 ppt |
Method Detection Limit | 500 ppt | 500 ppt |
Linearity | ±1% | ±1% |
Accuracy at span | ±5% @ full scale | ±5% @ full scale |
Accuracy at zero | ±25 ppt | ±100 ppt |
Instrument-to-Instrument Consistency | ±5% @ full scale | ±5% @ full scale |
Measurement Range | 0-1 ppm | 0-10 ppm |
Measurement Interval* | <4 seconds | |
Sample Flow Rate | ~2 slpm | |
Combined Response Times | <3 minutes | |
Fall Times | <1 minute | |
*-Measurement interval at span may increase as much as 2x above listed values.
Measurement Technique | Cavity Ring-Down Spectroscopy |
|---|---|
Calibration Period Recommendation | Calibration not required - Initial validation at 6 months, then every 12 months thereafter |
Time Required to Perform Validation | Estimated at <15 minutes per manufacturer's instructions |
Measurement Cell Temperature Control | ±0.005°C |
Measurement Cell Pressure Control | ±0.0002 atm |
Operating Temperature | 15 to 35°C (operating); -10 to 50°C (storage) |
Ambient Humidity | <99% RH non-condensing |
Accessories | Pump (external, included), keyboard (included), mouse (included), LCD monitor (optional), Maintenance Kit (optional) |
Communication Interfaces | RS-232, Ethernet, USB, analog 0–10 V, Modbus, 4-20mA (optional) |
Sample Inlet Connection | 1/4" Stainless Steel Swagelok® Tube Fitting (recommended 1/4" OD PFA Tubing) |
Dimensions | Analyzer: 17" w × 8.38" h x 24.4" d (43.2 × 21.3 × 62 cm) |
Weight | 73 lbs. (33.18 kg) including external pump |
Power Requirements | 100–240 VAC, 47–63 Hz (auto-sensing), <400 W (total): 250 W (analyzer), 150 W (pump) at steady state |
Warranty | 12 months |
Certifications | CE conformance |
Country of Manufacture | USA |
Components/Parts | Actions | Frequency |
|---|---|---|
Particulate filter | Replace | Every 6 months |
Measurement Validation | Proxy validation | Every 12 months |
Pump | Rebuild (diaphragm) | Preventive maintenance every 2 years |
Fan assemblies | Replace | Preventive maintenance every 2 years |
External Pump | Replace | Every 5 years |