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Volatile organic compounds (VOCs) and inorganic compounds within the lithography process cause defects on reticles, hazing of scanner optics, and other serious problems that damage expensive lithography tools and can result in yield loss. The Picarro SLiM 100 Lithography Monitoring System is a 1-ppb class detection system that integrates Picarro’s industry leading cavity ring-down spectroscopy (CRDS) analyzers into a high-performance sampling system specifically for monitoring VOCs in the fab. The SLiM 100 system is a real-time measurement system that is designed to run 24/7 in the fab environment. It is a fully integrated chemical metrology system that is robust, easy-to-operate, and is ideal for use as a high-volume process monitoring and control system. The Picarro SLiM 100 has the capability to measure 10 organic compounds that negatively affect the lithography process with concentration sensitivity down to 1 part-per-billion. The system can also accommodate analyzers that measure inorganic molecules at parts-per-trillion concentration levels.

Gas Detected

VOC: Acetic Acid, Acetone, D3 Siloxane, HMDSO, IPA, PGME, TMS, D6 Siloxane, NMP, PGMEA
Inorganic (Optional): NH3, HF, HCl, SO2, H2S (Depending on choice of analyzers from table below)

Sampling Line

1/2" OD x 3/8" ID UHP-PFA tubing

Number of Ports

24 or 32

Dimensions

Keyboard Tray Closed

  • 79" (H) × 34" (W) x 38" (D)
  • 2012 mm (H) × 864 mm (W) × 971 mm (D)

Keyboard Tray Open

  • 79" (H) × 34" (W) × 46" (D)
  • 2012 mm (H) x 864 mm (W) × 1172 mm (D)

Weight (without Analyzers)

  • 24 Port: 447 lbs (203 kg)
  • 32 Port: 482 Ibs (218 kg)
  • Add 75 lbs (34 kg) for each analyzer

Power Requirements

220-240 VAC single phase, 50/60 Hz, 20 Amp

Communication

Ethernet TCP/IP, RESTful API

Warranty

12 months

Certifications

CE, SEMI S2

Country of Manufacture

USA

Analyzers

Gases Measured

VOC Analyzer

VOC-10*

SI3401

NH3, HF, HCl

SI2205

HF

SI2108

HCl

SI2104

H2S

SI2306

HF, NH3

SI2103

NH3

SI5450

SO2

 

*-VOC (Acetic Acid, Acetone, D3 Siloxane, HMDSO, IPA, PGME, TMS, D6 Siloxane, NMP, PGMEA)
 

Part Numbers (Other Combinations Available)

SL100-24-EK00

24 port AMC system for NH3, HF, VOC

SL100-32-K000

32 port AMC system for VOC

SL100-32-AK00

32 port stationary AMC system for NH3, HF, HCl, VOC

Components/Parts

Actions

Frequency

Zero filter

Replace

Every 6 months

Particulate filter - Analyzer

Replace

Every 6 months

Pump - Analyzer  

Preventative Maintenance
Rebuild (Diaphragm)

Every 2 years

Fan assemblies - Analyzer  

Preventative Maintenance

Every 2 years

External pump - Analyzer   

Replace

Every 5 years