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The Picarro SI Series of analyzers can be integrated with the SLiM 100 and SAM systems to address specific monitoring needs. They combine the power of extreme sensitivity and accuracy for a range of organic contaminants and VOCs with a highly reliable, simple and compact design. They are compliant with SEMI standards, easy to install, and inexpensive to maintain.

AnalyzersGases Measured
SI3401NH3, HF, HCl
SI2205HF
SI2108HCl
SI2104H2S
SI2306HF, NH3
SI2103NH3
SI5450SO2